CyberOptics Highlights Best-Practices for Detecting Particles in Semiconductor Environments at SPIE
April 19, 2022 | CyberOptics CorporationEstimated reading time: 1 minute
CyberOptics Corporation, a leading global developer and manufacturer of high-precision 3D sensing technology solutions, will exhibit at SPIE Advanced Lithography and Patterning from April 27-28 at the San Jose Convention Center in California, booth #217. During the show, the company will feature the In-Line Particle Sensor (IPS) and ReticleSense wireless sensors for improved yields and productivity.
An extension of the industry-leading WaferSense and ReticleSense Airborne Particle Sensor (APS) technology that is documented by fabs as the Best Known Method (BKM), the In-Line Particle Sensor (IPS) with CyberSpectrum software detects particles in gas and vacuum lines 24/7. The IPS quickly identifies, monitors and enables troubleshooting of particles down to 0.1µm.
The IPS can be installed in any gas or vacuum system, and it is particularly relevant for EUVL tools where the ability to monitor particles in-line can significantly improve tool yield and productivity. For example, it can be installed at the vacuum line in between the EUV process chamber and the vacuum pump, saving significant time compared to current methods. The IPS is always on and collecting particle data, which is especially critical during chamber purging.
Process and equipment engineers in semiconductor fabs can speed equipment qualification with real-time monitoring, compare past and present data, as well as one tool to another. Contamination sources can be identified quickly and the effects of cleaning, adjustments and repairs can be seen in real-time. Fabs can shorten equipment maintenance cycles, lower equipment expenses and optimize preventative maintenance plans.
CyberOptics will also demonstrate the ReticleSense Airborne Particle Sensor (APSRQ) and the ReticleSense Auto Multi Sensor (AMSR) for wireless leveling, vibration, and relative humidity (RH) measurements.
Suggested Items
Real Time with... IPC APEX EXPO 2024: all4-PCB, A Premier Solution Provider for the PCB Industry
04/22/2024 | Real Time with...IPC APEX EXPOIn the PCB industry, all4-PCB, is a top-tier equipment supplier and process solution provider. Ralph Jacobo highlights the active market and the demand for high-quality equipment, discusses their existing customers, investment in advanced substrates, and smaller board shops.
Global Semiconductor Equipment Billings Slip to $106.3 Billion in 2023
04/10/2024 | SEMIWorldwide sales of semiconductor manufacturing equipment edged down 1.3% to $106.3 billion in 2023 from an all-time record of $107.6 billion in 2022, SEMI, the industry association representing the global electronics design and manufacturing supply chain, reported today. The data is now available in the Worldwide Semiconductor Equipment Market Statistics (WWSEMS) report.
iNEMI Unified Equipment Interaction Methodology Webinar
04/10/2024 | iNEMIiNEMI’s Unified Equipment Interaction Methodology Project was a collaboration between manufacturers and equipment suppliers to validate the feasibility and ease of implementation of SEMI standards being developed as part of the SEMI North America Fab & Equipment Computer and Device Security Task Force (CDS).
SCHMID Group Presents Breakthrough Solutions for Substrate Production at ISES USA
04/09/2024 | SCHMID GroupThe SCHMID Group, a global leader in providing solutions to the high-tech electronics, photovoltaics, glass, and energy systems industries participated in the International Semiconductor Executive Summit (ISES) USA this week.
Calumet Electronics Boosts PCB Production Capacity with Strategic CapX
04/05/2024 | Calumet ElectronicsCalumet Electronics is proud to announce a significant expansion of its domestic printed circuit board (PCB) production capacity at its campus in Michigan’s Upper Peninsula. Over the last four years, Calumet has strategically invested in manufacturing equipment, workforce development, and campus expansion.